Non-destructive inspection method and apparatus therefor

ABSTRACT

By using an image signal acquired by picking up a sample to be inspected by a color video camera, penetrant inspection and magnetic-particle inspection which are non-destructive inspections are carried out so that deficiency candidates including a pseudo deficiency are automatically detected and are displayed on a screen. A real deficiency can be detected from the deficiency candidates displayed on the screen. As image data is stored in memory means, information of a deficiency can be repeatedly reproduced on the screen. In the penetrant inspection, the chromaticity at each position on an image is acquired, a deficiency candidate is extracted based on the chrominance, and the deficiency is distinguished from a pseudo deficiency based on the differential value of the chrominance. A polarization filter is used to eliminate regular reflection originated from illumination in the penetrant inspection, and an ultraviolet-rays cutting filter is attached to the camera to prevent noise in the magnetic-particle inspection. Equipped with both a white illuminating lamp and an ultraviolet illuminating lamp, both inspections can be carried out with a single probe.

CROSS-REFERENCE TO RELATED APPLICATIONS

This is a continuation of application Ser. No. 09/889,920 filed Jul. 25,2001, (allowed), which is the national phase application frominternational application No. PCT/JP99/01676, the entire contents of allof which, as originally filed and also as made of record, isincorporated herein by reference.

TECHNICAL FIELD

The present invention relates to a method of inspecting a deficiency,such as a crack in a metal surface, and, more particularly, to aninspection method for performing non-destructive inspections calledpenetrant inspection and magnetic-particle inspection and an apparatustherefor.

BACKGROUND ART

A penetrant inspection and magnetic-particle inspection inspect adeficiency, such as a crack (crack) having an opening in the surface ofmetal in a non-destructive manner. In the penetrant inspection,normally, a red liquid called penetrant is applied to the surface to beinspected, the penetrant is wiped out after a predetermined time passes,and white powder called a developer is applied. If there is adeficiency, such as a crack, the penetrant remaining in the crack comesto the surface due to capillary phenomenon, indicating a deficiency inred. In case of magnetic-particle inspection, a solution containingfluorescent magnetic powder is sprayed on a specimen or a magneticsubstance to magnetize the specimen. If there is a deficiency, such as acrack, the magnetic flux is concentrated on the deficient portion, sothat the fluorescent magnetic powder is gathered and emits green lightwhen ultraviolet rays are irradiated, thereby showing a deficiency.Conventionally, those deficiency indications are observed visually toinspect deficiencies.

Such a visual inspection has a problem on the inspection reliability,such as missing of a deficiency due to the fatigue of an inspector orthat different inspection results due to the difference in capabilityamong inspectors are left merely by characters, such as “passed”.

With regard to the magnetic-particle inspection, an automatic inspectionapparatus has been developed for those parts which are important and areto be mass-produced. As it is a special-purpose apparatus, it cannoteasily inspect parts having multifarious shapes.

Further, as the penetrant inspection needs to detect surface colors as atwo-dimensional distribution at high precision, even if there is acalorimeter capable of accurately measuring the chromaticity at a point,two-dimensional sweeping is needed. In terms of inspection time andcost, therefore, it is difficult to easily perform automatic inspectionof parts having multifarious shapes.

Furthermore, when a specimen was large, there were cases where it couldnot tell what part of the specimen the image that was acquired byautomatic inspection was or what part of the specimen the detecteddeficiency was.

Moreover, if both the penetrant inspection and magnetic-particleinspection can be done automatically by a single apparatus, theeconomical merit would be improved significantly, but such an apparatusand technology have not yet appeared so far.

It is therefore an object of the invention to provide a deficiencyinspection method, a deficiency inspection apparatus and adeficiency-inspection aiding method which overcome the above-describedproblems and facilitate discrimination of real deficiencies.

It is also an object of the invention to provide a deficiency inspectionmethod, a deficiency inspection apparatus and a deficiency-inspectionaiding method which can easily find the position of a deficiency even ona large specimen.

DISCLOSURE OF INVENTION

The invention picks up a specimen using a color video camera. If a colorvideo camera is used directly, however, it cannot pickup an imageproperly in the penetrant inspection because of the irradiation-orientedregular reflection light from the specimen. In the magnetic-particleinspection, illumination light (ultraviolet rays) causes a foreignmatter on the specimen to emit blue light, making it difficult toidentify a deficiency. To eliminate the regular reflection light,therefore, a polarization filter is put in both the illumination and thecamera. Further, a filter for cutting ultraviolet rays is placed infront of the camera.

As the color camera, a white illuminating lamp and an ultravioletilluminating lamp are constructed as a single probe, it can be used bothin the penetrant inspection and magnetic-particle inspection. In thepenetrant inspection, xy chromaticities on the surface of the specimenare computed from a video signal from the color video camera to detect ared deficiency-indicating portion. In the magnetic-particle inspection,detection is made after differentiation is performed on a green videosignal to highlight a deficiency.

To prevent overlooking and overdetection in automatic inspection, theinspection result is displayed in a color image and portions that havebeen determined as deficiencies in the automatic inspection areencircled in rectangular shapes so that an inspector checks therectangular portions against the original images one by one todiscriminate if they are real deficiencies. The original images and theinspection results are saved as recordings on a magneto-optical disk orthe like.

When a specimen is like an elongated object which cannot be fitted inone field of view, the inspection position is specified by placing ascale in the pickup field of view and simultaneously picking up thescale and an image to be inspected.

BRIEF DESCRIPTION OF DRAWINGS

FIGS. 1A and 1B are diagrams showing examples of inspection targetswhich are handled in the invention.

FIG. 2 is a structural diagram of a deficiency inspection apparatusshowing one embodiment of the invention.

FIGS. 3A and 3B are diagrams showing the effects of a polarizationfilter in the apparatus structure in FIG. 2, and FIGS. 4A and 4B arediagrams showing the effects of an ultraviolet-rays cutting filter.

FIG. 5 is a flowchart illustrating the flow of an automatic inspectionmethod in a penetrant inspection according to the invention.

FIG. 6 shows an xy chromaticity diagram.

FIG. 7 is a diagram showing a structure for camera calibration, and FIG.8 is a diagram showing the flow of a camera calibration process.

FIGS. 9A-C are diagrams illustrating a method of acquiring a referencewhite chromaticity from a chrominance image.

FIG. 10 is a diagram for explaining a method of computing a hue on achromaticity diagram,

FIG. 11 is a diagram for explaining a method of computing a chrominanceon the chromaticity diagram,

FIG. 12 is a diagram illustrating a method of acquiring a deficiencycandidate area from the hue obtained in FIG. 10 and the chrominanceobtained in FIG. 11, and

FIGS. 13A-D are diagrams illustrating a method of acquiring a deficiencyarea by discriminating a pseudo deficiency from the deficiency candidatearea obtained in FIG. 12.

FIGS. 14A and 14B are diagrams for explaining a method of acquiring athreshold value 135 to acquire a deficiency area by discriminating apseudo deficiency from the deficiency candidate area shown in FIG. 13.

FIG. 15 is a diagram showing an example of an image processing algorithmin the magnetic-particle inspection of the invention, and FIGS. 16A-Dare diagrams for explaining a method of discriminating a pseudodeficiency in the magnetic-particle inspection of the invention.

FIG. 17 is a flowchart illustrating the process of confirming adeficiency and saving data in the invention.

FIG. 18 is a diagram exemplifying a method of generating a deficiencycandidate marker according to the invention, and

FIG. 19 is a diagram exemplifying a deficiency candidate displayingmethod according to the invention.

FIG. 20 is a diagram showing one example of a method of specifying aninspection position in the invention, and

FIG. 21 is a diagram showing one example of an inspection image whichcontains information for specifying the inspection position in theinvention.

FIG. 22 is a diagram showing one example of the structure of inspectionresult data to be stored in a memory device 7.

BEST MODE FOR CARRYING OUT THE INVENTION

A preferred embodiment of the invention will now be described withreference to the accompanying drawings.

FIG. 1 shows one example of a deficiency which is inspected in theinvention.

FIG. 1A shows one example of a penetrant inspection image, a whitepenetrant is applied to a specimen 1, a deficiency 2 (high contrast) andpseudo deficiencies 3 (low contrast) are observed. In the penetrantinspection, the deficiency 2 is highlighted as a red indicated pattern.The pseudo deficiencies appear when the penetrant stays insurface-polishing originated lines or the like and cannot be wiped outclean, and becomes a light red indicated pattern.

FIG. 1B shows one example of a magnetic-particle inspection image, andit is assumed that a deficiency 2 exists on a specimen and fluorescentmagnetic powder has already been applied and magnetized. Whenultraviolet rays are illuminated on it, the fluorescent magnetic powderthat has gathered on the deficiency 2 due to magnetization emits greenlight. If there is a welded portion in the specimen 1, for example, thefluorescent magnetic powder is gathered along welding beads so thatgreen pseudo deficiencies 3 appear in some cases.

FIG. 2 is a structural diagram of a deficiency inspection apparatusaccording to the invention. There are a deficiency 2 and pseudodeficiencies 3 on a specimen 1. They are picked up by a color videocamera 21. A white illuminating lamp 24 a is turned on in inspecting apenetrant inspection image, whereas an ultraviolet illuminating lamp 24b is turned on in the magnetic-particle test. The white illuminatinglamp 24 a is connected to a white-illuminating-lamp connector 25 a andis connected to an illumination power supply 8 by an illumination cable26.

In the magnetic-particle inspection, the illumination cable 26 isconnected to an ultraviolet-illuminating-lamp connector 25 b. To avoidthe influence of outside light, a hood 27 is attached. Although theilluminating lamp in use has a ring shape in FIG. 2, a single rod-shapedlamp or plural rod-shaped lamps may be used.

A color video signal from the color video camera 21 includes a type inwhich R, G and B are separated and a composite video signal. Eithersignal is stored as image data for R, G and B in a color image memory 4.The color image data is analyzed by a computer 5 and the results ofdeficiency detection are shown on a color monitor 6.

The deficiency inspection results are saved in a data memory device 7.Further, an image displayed on the color monitor 6 can be printed outfrom an unillustrated printer as needed.

A polarization filter 22 a and an ultraviolet-rays cutting filter 22 bare placed in front of the lens of the color video camera 21. Apolarization filter plate 23 is provided under the white illuminatinglamp 24 a. The polarization filter 22 a and the polarization filterplate 23 serve to prevent reflection of the illumination or regularreflection light from the specimen 1 in the inspection of the penetrantinspection image. While the output video image of the color video camera21 is watched, the polarization filter 22 a is turned and is fixed tothe place where there is least image reflection or light reflection. Theadjustment of the polarization filter 22 a may be done automaticallybased on the video output signal of the color video camera 21.

The ultraviolet-rays cutting filter 22 b serves to inhibit unnecessarylight emission from an adhered foreign matter caused by the ultravioletilluminating lamp 24 b.

FIG. 3 is a diagram showing the effects of the polarization filter 22 aand the polarization filter plate 23.

FIG. 3A shows a state where there are no filters, and FIG. 3B shows astate where the filters are attached and the rotational angles of thefilters are adjusted. In FIG. 3A, there is an illumination reflection30, making deficiency detection difficult. The ring-like illuminationreflection is on the assumption of a case where the white illuminatinglamp 24 a is ring-like. In FIG. 3B, this illumination reflection isgone.

FIG. 4 is a diagram showing the effects of the ultraviolet-rays cuttingfilter 22 b. FIG. 4A shows a state where there are no filters, and FIG.4B shows a state where the filters are attached. In FIG. 4A, lightemission from a foreign matter 40, such as a little piece of thread, andregular reflection light 41 from the specimen are picked up by the colorvideo camera 21, making deficiency detection difficult. In FIG. 4B,those noises are cut and the image shows only light emission by thefluorescent magnetic powder as in a case where the specimen 1 isvisually observed by a man.

To begin with, a method of detecting a crack deficiency in a penetrantinspection image will be explained with reference to FIGS. 5 through 13.FIG. 5 illustrates a method of automatically detecting the deficiency 2in the penetrant inspection.

First, image pickup 50 of the specimen 1 on which a developer is appliedis executed using the white illuminating lamp 24 a. Next, chromaticityconversion 51 to acquire xy chromaticity values of individual pixelsfrom acquired R, G and B color image data is executed.

Next, determination 52 of reference white to compute the reference whitechromaticity of the developer is performed and computation 53 of the hueand chrominance at each position on the image with respect to thereference white is carried out.

Then, a region whose hue and chrominance lie within a specific range isextracted by binarization in order to execute extraction 54 ofdeficiency candidates.

A real deficiency 2 has a clear contour portion, and a pseudo deficiencyoften has an unclear contour portion. In this respect, differentiation55 of the chrominance image is performed and the ratio of a change inchrominance of the contour portion of the extracted deficiency candidatearea is obtained. Next, shape measuring 56 for the area, the aspectratio, the length and so forth of the deficiency candidate area isperformed. Then, a region whose ratio of a change in chrominance andwhose length and area are larger than specified ones is detected as thereal deficiency 2 in detection 57 of deficiency. Further, the inspectionresults are displayed on the color monitor 6 and a deficiency isconfirmed by an inspector, after which image data, shape data,positional information, etc. are saved in the data memory device 7 orprinted out to be saved as a hardcopy 58.

In color-based inspection, it is necessary to evaluate colorsquantitatively. In the step of chrominance conversion 51, therefore, RGBdata of the picked-up color image is converted to chromaticities x, yand luminance Y that are specified by CIE (Commission internationale del'{acute over (e )}clairage), and inspection is carried out using them.Expression of chromaticities x, y in two-dimensional orthogonalcoordinates is called a chromaticity diagram shown in FIG. 6. In thechromaticity diagram, individual colors are arranged around white andbecome clearer as they are located farther away from white. Hereinafter,the tone is called a hue, the clearness of each color is called achromaticness and the distance between two chromaticities on thechromaticity diagram is called a chrominance. FIG. 6 shows achromaticity range of a penetrant inspection image.

In this method, color calibration is executed beforehand using a cameracalibration color card 71 as shown in FIG. 7 in order to performhigh-precision conversion of RGB data to chromaticities x, y andluminance Y. The flow of that process is shown in FIG. 8. The cameracalibration color card 71 has three or more colors painted. The colorsare picked up by the color video camera 21 (81), and the RGB values ofthe individual colors are computed (82). The chromaticities x, y andluminance Y are measured (83) by a calorimeter 72. The relationshipbetween the RGB values and xyY values is expressed by equations (1) andequation (2). $\begin{matrix}{\begin{pmatrix}X \\Y \\Z\end{pmatrix} = {\begin{pmatrix}a_{11} & a_{12} & a_{13} \\a_{21} & a_{22} & a_{23} \\a_{31} & a_{32} & a_{33}\end{pmatrix}\begin{pmatrix}R \\B \\G\end{pmatrix}}} & (1)\end{matrix}$where X, Y and Z are called three stimulus values. $\begin{matrix}{{{\text{chromaticity:}\quad x} = {{\frac{X}{X + Y + Z}\quad y} = \frac{Y}{X + \quad Y + Z}}}{\text{luminance:}\quad Y}} & (2)\end{matrix}$

The xyY values are computed by substituting the RGB values of the RGBvalues of the individual colors acquired from the camera into theequations (1) and (2) and conversion parameters specific to the cameraare obtained by acquiring a₁₁ to a₃₃ which make the values coincide withthe xyY values measured by the calorimeter. As there are nine unknownparameters, the parameters can be computed from the RGB values (R₁, G₁,B₁) to (R₃, G₃, B₃) of at least three colors and their corresponding xyzvalues (x₁, y₁, Y₁) to (X₃, y₃, Y₃) from the colorimeter.

As it is apparent from the equation (2) that XYZ can be computed fromthe xyY values from the following equation (3),X=Y×x/y, Y=Y, Z=Y×(1−x−y)/y   (3)XYZ are acquired by substituting the xyY values of the three colors fromthe colorimeter into the equation (3) and are substituted into theequation (1). $\begin{matrix}{\begin{pmatrix}X_{i} \\Y_{i} \\Z_{i}\end{pmatrix} = {\begin{pmatrix}a_{11} & a_{12} & a_{13} \\a_{21} & a_{22} & a_{23} \\a_{31} & a_{32} & a_{33}\end{pmatrix}\begin{pmatrix}R_{i} \\B_{i} \\G_{i}\end{pmatrix}\quad\left( {{i = 1},2,3} \right)}} & (4)\end{matrix}$Accordingly, it is possible to acquire conversion parameters a₁₁ to a₃₃specific to the camera (84) and acquire, from the RGB values from thecamera, the xyY values that are equal to the values from thecolorimeter.

Using the conversion parameters specific to the camera that have beencomputed beforehand by calibration, the RGB values acquired from thecamera are subjected to chromaticity conversion to xyY values and achromaticity distribution in the image is computed, after which thechromaticity value of the developer or the chromaticity of anon-deficient portion in the image is computed as a reference value in52. First, the chromaticities x, y of each pixel in the image arechecked and the number of pixels that take x, y values as given in agraph in FIG. 9A is counted to prepare the two-dimensional chromaticitydistribution of the chromaticities. Then, the x chromaticity value (FIG.9B) and the y chromaticity value (FIG. 9C) for which there are thelargest number of pixels in the image are acquired. As most of the imageis a non-deficient portion, the x, y chromaticity values at the peakvalues in the two-dimensional chromaticity distribution become xychromaticity values of the reference white.

In 53, the hue and chrominance at each position on the image withrespect to the reference white are computed. Given that the chromaticityof the reference white is (x_(c), y_(c)) and the chromaticity at theposition (i, j) on the image is (x_(ij), y_(ij)), the hue at theposition (i, j) is computed in the direction toward the reference coloron the chromaticity diagram as shown in FIG. 10. The computationequation is given in an equation (5). $\begin{matrix}{\text{hue:}\quad{\theta_{ij}\left( \frac{y_{ij} - y_{c}}{x_{ij} - x_{c}} \right)}} & (5)\end{matrix}$Further, the chrominance at the position (i, j) is computed in terms ofa distance from the reference color on the chromaticity diagram as shownin FIG. 11. The computation equation is given in an equation (6).chrominance: d_(ij)=√{square root over((x_(ij)−x_(c))²+(y_(ij)−y_(c))²)}  (6)

From the hue and chrominance at each position of the image with respectto the reference white computed in the above-described manner, the rangethat is wanted to be detected as a deficiency is limited by the hue (inthe diagram, the range of the hue θ is θ₁≦θ≦θ₂), and the degree of adifference in clearness of the color and the reference white is limitedby the chrominance (in the diagram, the range of the chrominance d isd₁≦d≦d₂). And, portions which lie within this range are extracted asdeficiency candidate areas.

Some of the deficiency candidates that have been acquired through thelimitation with the hue and chrominance may not be needed to be detectedas deficiencies. For example, a portion whose chromaticity graduallychanges with respect to the reference white is not a deficiency, but anarea which has a clear contour is a deficiency. Therefore, a portionwhose color changes gently with respect to the ambient colors isconsidered as a normal portion or pseudo deficiency 3, and a portionwhose color changes sharply is considered as a deficiency 2. In (55),the amounts of a change in chrominance with respect to the referencewhite are acquired for deficiency candidate areas and only the areawhose value is equal to or greater than a given value is considered as adeficiency.

A description will be given with reference to FIG. 13. FIG. 13A showsdeficiency candidate areas 131 extracted in 54. 133 in FIG. 13B is agraph of chrominance with respect to the reference white on 132 in FIG.13A. Further, the amount of a change in the chrominance 133 at eachposition on 132 or differentiation of 133 is a chrominancedifferentiation distribution 134 in FIG. 13D. Apparently, an area whichhas a small amount of a change in chrominance with respect to thereference white has a small differential value. As indicated in (d), anarea whose differential value is larger than a given value 135 isconsidered as a deficiency area. As a result, only a deficiency area 136which has a large chrominance and has a large amount of a change inchrominance or has a clear contour as in FIG. 13C is detected.

A method of determining the threshold value 135 will now be discussedwith reference to FIG. 14. In a graph in FIG. 14A, the vertical axis isthe maximum value in the chrominances in each deficiency candidate areaextracted by the hue and chrominance, the horizontal axis is the maximumvalue in the differential values of the chrominance at the contourportion of each deficiency candidate area, and the values for the realdeficiency 2 are plotted by X and the values for the pseudo deficiency 3are plotted by ◯. 141 a is a degree distribution of the individualchrominance differential values and 142 a is a degree distribution ofthe chrominance values. When a deficiency is clearly distinguished froma pseudo deficiency, a decision line 144 a should be a straight line 144a that passes the bottom peaks in the degree distributions 141 a and 142a and is perpendicular to a main axis 143 a of inertia at the plottedpoints. When a deficiency is not distinguished from a pseudo deficiency,a decision line should be 144 b as shown in FIG. 14B. That is, alldeficiency candidate areas are detected as deficiencies to avoid anyoverlooking and missing.

A deficiency detection method in the magnetic-particle inspection willnow be described using FIGS. 15 and 16.

FIG. 15 shows an example of an image processing algorithm to analyze thecontents of the data memory device 7 in the magnetic-particleinspection. Acquisition of an RGB image is performed (151), thendifferentiation of a G image which contains the largest amount ofemission information of the fluorescent magnetic powder is performed(152). This highlights a portion, such as a crack deficiency, which hasa large linear change in luminance Y, and does not highlight a portion,such as a portion where magnetic powder stays, which has a highluminance but has a small change in luminance.

Next, a threshold value for binarization is determined from the averagevalue of the G differential image and binarization is performed (153).An image noise, such as an isolated point, is removed from the binarizedimage (154), then deficiency candidates are acquired, after which thelengths, contrasts and so forth of those deficiency candidates arecomputed (155). When those values are larger than specified values, theyare determined as deficiencies.

FIG. 16 shows a method of discriminating a deficiency from a pseudodeficiency. When the luminance distributions of the deficiency 2 and thepseudo deficiency 3 are taken on a line 161 as shown in FIG. 16A, forexample, a luminance distribution 162 as shown in FIG. 16B is acquired.The luminance values of the deficiency 2 and the pseudo deficiency 3 areabout the same. Differentiating the luminance distribution 162 yields aluminance differential distribution 163 as shown in FIG. 16B. As theluminance of the deficiency 2 changes drastically and the luminance ofthe pseudo deficiency 3 changes slowly, only the deficiency 2 can beextracted as in FIG. 16C by determining the results of thedifferentiation using a decision threshold value 164 of FIG. 16D.

With reference to FIG. 17, confirmation of a deficiency and data savingwill be explained. Although a deficiency should have been distinguishedfrom a pseudo deficiency and only a deficiency should have beenextracted, visual confirmation of a deficiency is executed last in boththe penetrant inspection and the magnetic-particle inspection in orderto prevent missing or erroneous determination.

FIG. 17 is a flowchart illustrating the process of confirming adeficiency. First, a marker of a deficiency candidate is shown on theportion which has been determined as a deficiency in the automaticdetermination (171). Next, the computer 5 request an inspector todetermine deficiency candidates one by one (172). The inspectordetermines if it is a real deficiency while viewing the color originalimage (173). When the inspector recognizes it as a real deficiency, theposition, length, contrast and so forth of the deficiency are registeredin the data memory device 7 (174) and the color of the marker is turnedto red (175).

When the inspector determines the portion as a deficiency candidate inthe confirmation of the deficiency candidate, the marker is erased(176). If there remains a deficiency candidate, the marker is given onthe next deficiency candidate. When confirmation of all the deficiencycandidates is completed (177), the color original image is saved in thedata memory device 7 (178).

FIG. 18 exemplifies a method of generating a deficiency candidatemarker. A center line 182 which connects a beginning point P1 and an endpoint P2 of a deficiency candidate 181 is acquired, and long sides ABand CD of a deficiency candidate marker 183 are set in parallel to andapart from the center line by a given value m. Short sides AD and BC arelikewise determined. The length of the deficiency is a distance betweenP1 and P2. In case of the magnetic-particle inspection, the contrastthat is related to the depth of the deficiency is acquired by scanning acontrast computation line 184 from P1 to P2, acquiring a differencebetween an average luminance and a highest luminance on this line,acquiring this difference from P1 to P2, and setting an average value ofthe differences as the contrast of the deficiency. The deficiencycandidate marker should not necessarily be rectangular. The short sidesAD and BC may be made semicircles; the key point is that a deficiencyshould not be hidden by the marker.

FIG. 19 exemplifies a method of displaying a deficiency candidate on thecolor monitor 6. The inspector is requested to confirm candidates on theoriginal image in order from a candidate whose deficiency length islong. First, all the markers are displayed in white, the marker of thecandidate which has been determined as a real deficiency is changed toanother color, e.g., red, and the marker of the candidate which has beendetermined as a pseudo deficiency is erased.

FIG. 20 shows one example of a method of specifying an inspectionposition when the specimen 1 is an elongated object. A scale 201 withgraduations is fixed to the specimen 1 and image pickup is carried outin such a way that the scale 201 comes into a part of a camera's visualfield 202. The graduations of the scale may be made by writing numerals,for example, every centimeter. Further, the scale 201 for the penetrantinspection may be made different in color from the scale 201 for themagnetic-particle inspection. In the magnetic-particle inspection, forexample, the numerals on the scale are graduations and numerals influorescent green color on the white background.

FIG. 21 shows one example of a picked-up screen. The scale 201 is pickedup at the lower portion of the screen at the same time, and the cameraposition on the specimen 1 is computed from the scale 201. That is,graduation numerals 210 are described on the scale 201 and can beidentified by pattern matching or the like using the computer 5. Thescale 201 has segmentation lines 211, for example, every centimeter, sothat the finer camera position can be computed. A cross-section signal213 is acquired as an image signal of an inspection line 212 between C1and C2 on the image. From the signal, a left-hand end A and a right-handend B of the image and the positions of 16-20 of the segmentation lines211 are known. The image pickup magnification can be computed from thepositions of 16-20, and the accurate position of the deficiency 2 on thespecimen 1 can be known based also on the graduation numerals 210.

The above-described inspection results are stored in the memory device7, and an example of the storage is illustrated in FIG. 22. When thespecimen 1 has a large surface to be inspected and the wholeto-be-inspected surface cannot fit in a single inspection screen, it issegmented into several images before image pickup and inspection arecarried out. At this time, the images to be segmented are set in such away that the pickup ranges on the inspection surface overlap one anothera little. 221 a, 221 b and 221 c indicate image segments of the specimen1. Inspection is performed on each image segment. The results or theentire image information for each specimen is stored together andinformation of each deficiency, such as the position, length, area,chromaticity and hue, is also stored as shown in 222.

The inspector first displays the data 222 for each specimen stored inthe memory device 7 on the screen of the monitor 6 and checks it. Whenthe inspector wants to see the details of the portion where a deficiencyexists, he calls a corresponding image segment from the name of thespecimen and the image No. and displays it on the screen of the monitor6. At this time, information, such as the position, length, area,chromaticity and hue of a deficiency, which is stored in associationwith the displayed image data can also be displayed on the screen of themonitor 6.

Highlighting the detected deficiency candidate on the screen using amarker or the like can prevent overlooking of a deficiency, on thescreen, which is larger than 0.1 to 0.3 mm of the same degree as that inthe visual inspection done conventionally.

Further, increasing the image detection magnification can permit adeficiency smaller than a visible one to be detected. Displaying adeficiency smaller than a visible one on the screen in magnified mannercan allow the position, length, area, chromaticity, hue, etc. of even adeficiency smaller than a visible one to be confirmed on the screen.

As an image is input using a color video camera according to theinvention and ultraviolet rays reflected from a specimen can be cut bythe ultraviolet-rays cutting filter in deficiency inspection by themagnetic-particle inspection method, an inspector can easily confirm theresults of the automatic deficiency inspection. Further, because adeficiency candidate is automatically indicated and displayed on thescreen, miss-inspection hardly occurs. What is more, as the inspectedimage is saved, it is possible to display the image saved afterinspection on the screen and check a deficiency again, thus improvingthe inspection reliability.

As a color video camera is used in the invention, automatic deficiencyinspections of the magnetic-particle inspection and penetrant inspectioncan be executed by the same sensor probe, so that the usability isimproved considerably.

1. A deficiency inspection method based on a magnetic-particleinspection scheme, wherein a to-be-inspected surface of a specimen ispicked up using a color video camera and a deficiency on saidto-be-inspected surface is inspected using an image acquired by thatimage pickup.
 2. The deficiency inspection method according to claim 1,wherein a deficiency on said to-be-inspected surface of a specimen ispicked up using a color video camera and a deficiency on saidto-be-inspected surface is inspected using a green (G) signal componentin signals of primary colors of RGB in said image picked up by saidcolor video camera.
 3. A deficiency inspection method based on amagnetic-particle inspection scheme, wherein a to-be-inspected surfaceof a specimen to which a solution containing fluorescent magnetic powderis applied is irradiated with ultraviolet rays, said to-be-inspectedsurface irradiated with ultraviolet rays is picked up by a color videocamera, and an image acquired by that image pickup is displayed on ascreen in a nearly same state as an image acquired by visually observingsaid to-be-inspected surface irradiated with ultraviolet rays.
 4. Adeficiency inspection method based on a magnetic-particle inspectionscheme, wherein a to-be-inspected surface of a specimen to which asolution containing fluorescent magnetic powder is applied is irradiatedwith ultraviolet rays, said to-be-inspected surface irradiated withultraviolet rays is picked up by a color video camera via anultraviolet-rays cutting filter, a deficiency and deficiency candidatesare extracted from an image acquired by that image pickup, and images ofsaid extracted deficiency and deficiency candidates are displayed on ascreen.
 5. A deficiency inspection method based on a penetrantinspection scheme, wherein a to-be-inspected surface of a specimen ispicked up using a color video camera and a deficiency on saidto-be-inspected surface is inspected using an image acquired by thatimage pickup.
 6. A deficiency inspection method based on a penetrantinspection scheme, wherein a to-be-inspected surface of a specimen isilluminated with polarization light, said to-be-inspected surfaceilluminated with polarization light is picked up by a color video cameravia a polarization filter, a deficiency and deficiency candidates areextracted from an image acquired by that image pickup, and images ofsaid extracted deficiency candidates are displayed.
 7. A deficiencyinspection method based on a probing scheme, wherein a to-be-inspectedsurface of a specimen is picked up by a color video camera withpositional information of a visual field of said color video cameraplaced in said visual field, deficiency candidates in saidto-be-inspected surface are extracted from an image acquired by thatimage pickup, and images of said extracted deficiency candidates aredisplayed on a screen together with said positional information of saidvisual field.
 8. The deficiency inspection method according to claim 7,wherein said positional information of said visual field is originatedfrom a scale arranged in said visual field.
 9. The deficiency inspectionmethod according to any one of claims 1 to 8, wherein saidto-be-inspected surface is picked up by said color video camera overplural visual fields.
 10. A deficiency inspection method based on aprobing scheme, wherein a to-be-inspected surface of a specimen ispicked up by image pickup means, deficiency candidates in saidto-be-inspected surface are extracted from an image acquired by thatimage pickup, images of said extracted deficiency candidates aredisplayed on a screen, and a pseudo deficiency is eliminated from saiddisplayed images of said deficiency candidates.
 11. A deficiencyinspection method based on a probing scheme, wherein a to-be-inspectedsurface of a specimen is picked up by image pickup means, deficiencycandidates in said to-be-inspected surface are extracted from an imageacquired by that image pickup, images of said extracted deficiencycandidates are displayed on a screen, and information about a deficiencyselected from said images of said displayed deficiency candidates isstored.
 12. A deficiency inspection apparatus based on a probing scheme,comprising: illumination means for illuminating a to-be-inspectedsurface of a specimen; image pickup means for picking up saidto-be-inspected surface by a color video camera; deficiency-candidateextraction means for extracting deficiency candidates on saidto-be-inspected surface from an image of said to-be-inspected surfaceacquired by image pickup by said image pickup means; and display meansfor displaying images of said deficiency candidates extracted by saiddeficiency-candidate extraction means.
 13. The deficiency inspectionapparatus according to claim 12, wherein said illumination means has anultraviolet-rays illuminating section for illuminating ultraviolet raysonto said to-be-inspected surface of said specimen, and a white-lightilluminating section for illuminating white light onto saidto-be-inspected surface of said specimen.
 14. A deficiency inspectionapparatus based on a probing scheme, comprising: illumination means forilluminating a to-be-inspected surface of a specimen; image pickup meansfor picking up said to-be-inspected surface by a color video camera;magnetic-particle-inspection-originated deficiency-candidate extractionmeans for extracting magnetic-particle-inspection originated deficiencycandidates on said to-be-inspected surface from an image of saidto-be-inspected surface acquired by that image pickup by said imagepickup means; penetrant-inspection-originated deficiency-candidateextraction means for extracting penetrant-inspection-originateddeficiency candidates on said to-be-inspected surface from said image ofsaid to-be-inspected surface acquired by image pickup by said imagepickup means; and display means for displaying images of said deficiencycandidates extracted by said magnetic-particle-inspection-originateddeficiency-candidate extraction means or saidpenetrant-inspection-originated deficiency-candidate extraction means.15. A deficiency inspection apparatus based on a probing scheme,comprising: illumination means for illuminating a to-be-inspectedsurface of a specimen; image pickup means for picking up saidto-be-inspected surface by a color video camera; deficiency-candidateextraction means for extracting deficiency candidates on saidto-be-inspected surface from an image of said to-be-inspected surfaceacquired by image pickup by said image pickup means; a storage sectionfor storing images of said deficiency candidates extracted by saiddeficiency-candidate extraction means; and display means for displayinginformation of said images of said deficiency candidates stored in saidstorage section on a screen.
 16. A deficiency inspection apparatus basedon a probing scheme, comprising: ultraviolet-rays irradiation means forirradiating ultraviolet rays to a to-be-inspected surface of a specimento which a solution containing fluorescent magnetic powder is applied;image pickup means for picking up said to-be-inspected surfaceirradiated with ultraviolet rays by said ultraviolet-rays irradiationmeans by a color video camera; and display means for displaying an imageof said to-be-inspected surface acquired by image pickup by said imagepickup means on a screen in a nearly same state as an image acquired byvisually observing said to-be-inspected surface irradiated withultraviolet rays.
 17. A deficiency inspection apparatus based on aprobing scheme, comprising: ultraviolet-rays irradiation means forirradiating ultraviolet rays to a to-be-inspected surface of a specimento which a solution containing fluorescent magnetic powder is applied;image pickup means for picking up said to-be-inspected surfaceirradiated with ultraviolet rays by said ultraviolet-rays irradiationmeans by a color video camera via an ultraviolet-rays cutting filter;deficiency-candidate extraction means for detecting deficiencycandidates on said to-be-inspected surface from an image of saidto-be-inspected surface acquired by image pickup by said image pickupmeans, and display means for displaying images of said deficiencycandidates extracted by said deficiency-candidate extraction means. 18.A deficiency inspection apparatus based on a probing scheme, comprising:ultraviolet-rays irradiation means for irradiating ultraviolet rays to ato-be-inspected surface of a specimen to which a solution containingfluorescent magnetic powder is applied; image pickup means for pickingup a fluorescent image of said to-be-inspected surface irradiated withultraviolet rays by said ultraviolet-rays irradiation means by a colorvideo camera; deficiency-candidate extraction means for extractingdeficiency candidates on said to-be-inspected surface using a green (G)signal component in a color image signal output from said image pickupmeans; and display means for displaying images of said deficiencycandidates extracted by said deficiency-candidate extraction means. 19.A deficiency inspection apparatus based on a probing scheme, comprising:illumination means for illuminating a to-be-inspected surface of aspecimen to which a penetrant is temporarily applied with white light;image pickup means for picking up said to-be-inspected surface by acolor video camera; magnetic-particle-inspection-originateddeficiency-candidate extraction means for extractingmagnetic-particle-inspection originated deficiency candidates on saidto-be-inspected surface from an image of said to-be-inspected surfaceacquired by that image pickup by said image pickup means;penetrant-inspection-originated deficiency-candidate extraction meansfor extracting penetrant-inspection-originated deficiency candidates onsaid to-be-inspected surface from said image of said to-be-inspectedsurface acquired by image pickup by said image pickup means; and displaymeans for displaying images of said deficiency candidates extracted bysaid magnetic-particle-inspection-originated deficiency-candidateextraction means or said penetrant-inspection-originateddeficiency-candidate extraction means.
 20. The deficiency inspectionapparatus according to any one of claims 12 to 19, wherein positionalinformation display means for displaying positional information of avisual field of said color video camera is arranged in said visualfield.
 21. The deficiency inspection apparatus according to claim 20,wherein said positional information display means is a scale.